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Next generation biological warfare. Create an incurable new virus or disease and naturally you can eradicate 95% of a particular targeted population very rapidly, the other 5% are those would can become naturally immune. The only thing is uncontrolled biological warfare kills simply everyone, not just your enemy soldiers, but also most of the human population. Biological warfare combined with chemical warfare is even more lethal to a populace, and still allows the land to be usable afterward, unlike nukes and massive physically destructive weapons.
